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      LED芯片是如何制造的?

      來源: | 發布日期:2023-02-15
              什么是LED芯片呢?那么它有什么特点呢?LED芯片制造主要是为了制造有效可靠的低欧姆接触电极,并能满足可接触材料之间较为小的压降及提供焊线的压垫,同时尽可能的多地出光。渡膜工艺一般用真空蒸镀方法,4Pa高真空下,用电阻加热或电子束轰击加热方法使材料熔化,并在低气压下BZX79C18变成金属蒸气沉积在半导体材料表面。

        一般所用的P型接觸金屬包括AuBe、AuZn等合金,N面的接觸金屬常采用AuGeNi合金。鍍膜後形成的合金層還需要通過光刻工藝將發光區盡可能多地露出來,使留下來的合金層能滿足有效可靠的低歐姆接觸電極及焊線壓墊的要求。光刻工序結束後還要通過合金化過程,合金化通常是在H2或N2的保護下進行。合金化的時間和溫度通常是根據半導體材料特性與合金爐形式等因素決定。當然若是藍綠等芯片電極工藝還要複雜,需增加鈍化膜生長、等離子刻蝕工藝等。

        LED芯片制造工序中,哪些工序對其光電性能有比較重要的影響?

        一般來說,LED外延生産完成之後她的主要電性能已定型,芯片制造不對其産甞核本性改變,但在鍍膜、合金化過程中不恰當的條件會造成一些電參數的不良。比如說合金化溫度偏低或偏高都會造成歐姆接觸不良,歐姆接觸不良是芯片制造中造成正向壓降VF偏高的主要原因。在切割後,如果對芯片邊緣進行一些腐蝕工藝,對改善芯片的反向漏電會有較好的幫助。這是因爲用金剛石砂輪刀片切割後,芯片邊緣會殘留較多的碎屑粉末,這些如果粘在LED芯片的PN結處就會造成漏電,甚至會有擊穿現象。另外,如果芯片表面光刻膠剝離不幹淨,將會造成正面焊線難與虛焊等情況。如果是背面也會造成壓降偏高。在芯片生産過程中通過表面粗化、劃成倒梯形結構等辦法可以提高光強。

        LED芯片爲什麽要分成不同尺寸?尺寸大小對LED光電性能有哪些影響?

        LED芯片大小根據功率可分爲小功率芯片、中功率芯片和大功率芯片。根據客戶要求可分爲單管級、數碼級、點陣級以及裝飾照明等類別。至于芯片的具體尺寸大小是根據不同芯片生産廠家的實際生産水平而定,沒有具體的要求。只要工藝過關,芯片小可提高單位産出並降低成本,光電性能並不會發生根本變化。芯片的使用電流實際上與流過芯片的電流密度有關,芯片小使用電流小,芯片大使用電流大,它們的單位電流密度基本差不多。考慮到散熱是大電流下的主要問題,所以它的發光效率比小電流低。另一方面,由于面積增大,芯片的體電阻會降低,所以正向導通電壓會有所下降。

        LED大功率芯片一般指多大面積的芯片?爲什麽?

        用于白光的LED大功率芯片一般在市場上可以看到的都在40mil左右,所謂的大功率芯片的使用功率一般是指電功率在1W以上。由于量子效率一般小于20%大部分電能會轉換成熱能,所以大功率芯片的散熱很重要,要求芯片有較大的面積。

        制造GaN外延材料的芯片工藝和加工設備與GaP、GaAs、InGaAlP相比有哪些不同的要求?爲什麽?

        普通的LED紅黃芯片和高亮四元紅黃芯片的基板都采用GaP、GaAs等化合物半導體材料,一般都可以做成N型襯底。采用濕法工藝進行光刻,較爲後用金剛砂輪刀片切割成芯片。GaN材料的藍綠芯片是用的藍寶石襯底,由于藍寶石襯底是絕緣的,所以不能作爲LED的一個極,必須通過幹法刻蝕的工藝在外延面上同時制作P/N兩個電極並且還要通過一些鈍化工藝。由于藍寶石很硬,用金剛砂輪刀片很難劃成芯片。它的工藝過程一般要比GaP、GaAs材料的LED多而複雜。

        “透明電極”芯片的結構與它的特點是什麽?

        所謂透明電極一是要能夠導電,二是要能夠透光。這種材料現在較爲廣泛應用在液晶生産工藝中,其名稱叫氧化铟錫,英文縮寫ITO,但它不能作爲焊墊使用。制作時先要在芯片表面做好歐姆電極,然後在表面覆蓋一層ITO再在ITO表面鍍一層焊墊。這樣從引線上下來的電流通過ITO層均勻分布到各個歐姆接觸電極上,同時ITO由于折射率處于空氣與外延材料折射率之間,可提高出光角度,光通量也可增加。

        用于半導體照明的芯片技術的發展主流是什麽?

        隨著半導體LED技術的發展,其在照明領域的應用也越來越多,特別是白光LED的出現,更是成爲半導體照明的熱點。但是關鍵的芯片、封裝技術還有待提高,在芯片方面要朝大功率、高光效和降低熱阻方面發展。提高功率意味著芯片的使用電流加大,較爲直接的辦法是加大芯片尺寸,現在普遍出現的大功率芯片都在1mm×1mm左右,使用電流在350mA.由于使用電流的加大,散熱問題成爲突出問題,現在通過芯片倒裝的方法基本解決了這一文題。隨著LED技術的發展,其在照明領域的應用會面臨一個從未有的機遇和挑戰。

        什麽是“倒裝芯片?它的結構如何?有哪些優點?

        藍光LED通常采用Al2O3襯底,Al2O3襯底硬度很高、熱導率和電導率低,如果采用正裝結構,一方面會帶來防靜電問題,另一方面,在大電流情況下散熱也會成爲較爲主要的問題。同時由于正面電極朝上,會遮掉一部分光,發光效率會降低。大功率藍光LED通過芯片倒裝技術可以比傳統的封裝技術得到更多的有效出光。

        現在主流的倒裝結構做法是:首先制備出具有適合共晶焊接電極的大尺寸藍光LED芯片,同時制備出比藍光LED芯片略大的矽襯底,並在上面制作出供共晶焊接的金導電層及引出導線層(超聲金絲球焊點)。然後,利用共晶焊接設備將大功率藍光LED芯片與矽襯底焊接在一起。

      這種結構的特點是外延層直接與矽襯底接觸,矽襯底的熱阻又遠遠低于藍寶石襯底,所以散熱的問題很好地解決了。由于倒裝後藍寶石襯底朝上,成爲出光面,藍寶石是透明的,因此出光問題也得到解決。以上就是LED技術的相關知識,相信隨著科學技術的發展,未來的LED燈回越來越高效,使用壽命也會由很大的提升,爲我們帶來更大便利。

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